JPS6186925U - - Google Patents
Info
- Publication number
- JPS6186925U JPS6186925U JP17143784U JP17143784U JPS6186925U JP S6186925 U JPS6186925 U JP S6186925U JP 17143784 U JP17143784 U JP 17143784U JP 17143784 U JP17143784 U JP 17143784U JP S6186925 U JPS6186925 U JP S6186925U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- semiconductor manufacturing
- operating
- rod
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17143784U JPS6186925U (en]) | 1984-11-12 | 1984-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17143784U JPS6186925U (en]) | 1984-11-12 | 1984-11-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6186925U true JPS6186925U (en]) | 1986-06-07 |
Family
ID=30729124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17143784U Pending JPS6186925U (en]) | 1984-11-12 | 1984-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6186925U (en]) |
-
1984
- 1984-11-12 JP JP17143784U patent/JPS6186925U/ja active Pending